Abstract:Precision micromotion reduction mechanism can provide precision motion displacement in a small space, which can be widely used in microelectronics, medical devices and chip packaging and other precision operation fields. A precision micromotion reduction mechanism was designed-based on the principle of flexible hinge lever and the principle of no additional motion, which was able to reduce the input displacement according to 2∶1 precision, and there was no additional force and displacement in the process of motion. The stiffness analysis of the designed precision micromotion reduction mechanism was carried out by the equivalent stiffness method, and the theoretical stiffness of the mechanism was calculated to be 75.72 N/μm;the stiffness of the precision micromotion reduction mechanism was analyzed by the finite element method to be 74.06 N/μm;and the stiffness of the precision micromotion reduction mechanism was measured by the experimental method to be 68.86 N/μm. The error between the theoretical analysis results and finite element analysis results was 2.19%, and the error between the theoretical analysis results and experimental results was 9.06%. The analysis results verified the validity and accuracy of the analysis method of equivalent stiffness method. The results of the study had important theoretical reference value for the design and stiffness analysis of precision micromanipulation mechanism.