Design and Experiment of Precision Micro-drive Amplifying Mechanism Based on Principle of Balanced Additional Force
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    Abstract:

    The micro-drive mechanism is an important component to achieve ultra-precision positioning. Based on the principle of balancing additional force, a precision micro-drive amplifying mechanism with adjustable amplification ratio was designed, and the strength, dynamic and kinematics analysis of the mechanism were completed. Based on the principle of balancing additional force, a micro-drive amplifying mechanism without additional force and displacement was designed to ensure the safety and precision of the movement process. The strength analysis of the mechanism was completed by the finite element method, and the results showed that the strength of the system met the design requirements. The finite element method and experimental analysis were used to complete the dynamic performance analysis of the mechanism, and the maximum relative error was 9.41%. The results showed that the dynamic performance of the mechanism met the design requirements and resonance did not occur during the motion process. The kinematics analysis of the mechanism was completed by theoretical calculation, finite element analysis and experimental analysis. The kinematic equation of the mechanism was resolved based on the linear fitting of the three methods. The relative error between the theoretical calculation and experimental analysis of the micro-drive amplifying mechanism was 9.4% (the maximum error was 0.85μm), and the relative error between the finite element and experimental analysis was 7.8% (the maximum error was 0.57μm). The correlation coefficient of motion linear fitting was not less than 0.998. The results showed that the micro-drive amplifying mechanism had the advantages of excellent strength and dynamic performance, precise movement, and high linearity.

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History
  • Received:August 27,2022
  • Revised:
  • Adopted:
  • Online: September 23,2022
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