Positioning Control of Piezoelectric Macro-micro Dual Drive
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    Abstract:

    Based on the piezoelectric driver, a macro-micro dual drive precision positioning system was designed. The macro stage of the system was drove by servo motor. The micro stage was consisted of piezoelectric driver and flexible hinge, and drove by the former. The micro stage was mounted on the macro stage and showed a series connection. The macro stage and micro stage were used to realize large workspace and compensate the error of position, respectively. With the open serve control of motion control card, the control system of macro motion and micro motion was harmonized. The positioning feedback was realized by two high precision optical grating. The precision detection was completed by laser interferometer. In the whole closed loop control system, the micro stage compensated the position error when the macro stage finished moving. Experiment results showed that within the travel range of 100mm,the position error in every millimeter was less than ±100nm.

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