of Force Balance for 2-DOF Nanopositioning Magnetic Levitation Stage
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    Abstract:

    In order to eliminate the additional moments of force, the magnetic force, gravity force and friction force were studied in a novel two-degree-of-freedom (2-DOF) nanopositioning magnetic levitation stage. The structure of the nanopositioning stage was designed in terms of the theory of force balance, then, the direction and coordinate point of the drive force of the nanomotor were gained. The experiment of linearity and repeatability of the stage were carried out, and the experiments results indicated that the yaw error was less than 5 arcsec, the pitch error was less than 15 arcsec and the repeatability of these two errors were nearly 1 arcsec per one millimeter. The stage movement was stable.

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