基于平衡附加力原理的微动放大机构设计与实验
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国家自然科学基金项目(51805428)、陕西省创新能力支撑计划项目(2021TD-27)和陕西省教育厅青年创新团队建设科研计划项目(22JP045)


Design and Experiment of Precision Micro-drive Amplifying Mechanism Based on Principle of Balanced Additional Force
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    摘要:

    微动机构是实现超精密定位的重要部件。本文基于平衡附加力原理设计一种放大比可调的精密微动放大机构,并完成机构强度、动态、运动学分析。基于平衡附加力原理设计了一种无附加力及位移的微动放大机构,可确保运动过程的安全性及精密性。采用有限元法完成了机构强度分析,结果表明系统强度满足设计要求。采用有限元法及实验分析完成了机构的动态性能分析,二者最大相对误差为9.41%,结果表明机构动态性能符合设计要求且运动过程中不会发生共振。采用理论计算、有限元分析及实验分析完成了机构运动学分析,在完成3种方法线性拟合基础上解析了机构运动方程,微动放大机构理论与实验分析相对误差为9.4%(二者最大绝对误差为0.85μm),有限元与实验分析相对误差为7.8%(二者最大绝对误差为0.57μm),运动线性拟合相关系数不小于0.998。结果表明微动放大机构具有强度及动态性能优良、运动精密、线性度高等优点。

    Abstract:

    The micro-drive mechanism is an important component to achieve ultra-precision positioning. Based on the principle of balancing additional force, a precision micro-drive amplifying mechanism with adjustable amplification ratio was designed, and the strength, dynamic and kinematics analysis of the mechanism were completed. Based on the principle of balancing additional force, a micro-drive amplifying mechanism without additional force and displacement was designed to ensure the safety and precision of the movement process. The strength analysis of the mechanism was completed by the finite element method, and the results showed that the strength of the system met the design requirements. The finite element method and experimental analysis were used to complete the dynamic performance analysis of the mechanism, and the maximum relative error was 9.41%. The results showed that the dynamic performance of the mechanism met the design requirements and resonance did not occur during the motion process. The kinematics analysis of the mechanism was completed by theoretical calculation, finite element analysis and experimental analysis. The kinematic equation of the mechanism was resolved based on the linear fitting of the three methods. The relative error between the theoretical calculation and experimental analysis of the micro-drive amplifying mechanism was 9.4% (the maximum error was 0.85μm), and the relative error between the finite element and experimental analysis was 7.8% (the maximum error was 0.57μm). The correlation coefficient of motion linear fitting was not less than 0.998. The results showed that the micro-drive amplifying mechanism had the advantages of excellent strength and dynamic performance, precise movement, and high linearity.

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杨满芝,李林岳,张传伟,魏凯洋,党蒙,景钢.基于平衡附加力原理的微动放大机构设计与实验[J].农业机械学报,2022,53(12):452-458. YANG Manzhi, LI Linyue, ZHANG Chuanwei, WEI Kaiyang, DANG Meng, JING Gang. Design and Experiment of Precision Micro-drive Amplifying Mechanism Based on Principle of Balanced Additional Force[J]. Transactions of the Chinese Society for Agricultural Machinery,2022,53(12):452-458.

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  • 收稿日期:2022-08-27
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  • 在线发布日期: 2022-09-23
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