Based on the piezoelectric principle, in consideration of adhesion, interaction between asperities, elastic-plastic deformation of the substrate, microcantilever elastic recovery and so on, the dynamic characteristics between microcantilever and the substrate rough surface driven by piezoelectric were simulated by using ABAQUS finite element software. The results showed that there were several significant contactseparation cases during the contact process of each piezoelectric driving. When no voltage was applied for 2~4μs, bonding between beam and the substrate still appeared. A small portion of the elasticplastic deformation on the rough surface occurred during separation, and the maximum residual stress appeared at the edge of the contact area. With the increase of piezoelectric driving times, the effect of surface bonding enhanced and the plastic deformation region on the substrate rough surface extended to two sides continuously, which influenced the reliability of the contact system.