In order to improve the positioning accuracy of micro transmission platform, the geometric errors were mainly analyzed. The mapping relationship between output pose errors of micro transmission platform and geometric errors of structural parameters was built through the method of differential relationship. And then the influence of structural parameters on the micro transmission platform positioning accuracy was analyzed by introducing the error weight coefficient, and the precision compensation model of micro transmission platform was established. Then a simulation calculation through Matlab software and an experiment test on the experimental platform were carried out. The results of simulation and experimental test showed that the error analysis model based on the weight coefficient method is reasonable, and what’s more, through the established precision compensation model, the micro transmission platform’s positioning error descended to 10%~15% after compensating, which was 20%~30% before compensating, and that made the micro transmission platform achieve a higher positioning accuracy.