Aimed to the problem of measurement error influence of soil profile moisture sensor caused by variation of soil physical and chemical properties, the soil profile moisture sensor was firstly designed based on high frequency capacitor. And then the analysis was made through the experiments of sensor output voltage influenced by variation of soil physical and chemical properties such as soil temperature, electrical conductivity and bulk density. Thirdly, the soil moisture correction model based on the influence of temperature was established through statistics regression processing method. The performance of sensor was tested at last. The experiment results showed that the sensor output voltage linearly increased with soil temperature changes ranged from 5℃ to 45℃, and it decreased with electrical conductivity increasing when the electrical conductivity was greater than 2mS/cm. Moreover, the sensor output voltage showed a decreasing trend with bulk density increasing. The largest measuring absolute error was 4.70%, root-mean-square error was 0.02524 and correlation coefficient R2 was 0.9679 through comparing the measuring value between sensor and traditional drying method at normal temperature.