刘定强,黄玉美,谢礼,杨勇.压电型宏微双驱动精密定位系统点位协调控制[J].农业机械学报,2011,42(4):220-223,233.
Liu Dingqiang,Huang Yumei,Xie Li,Yang Yong.Positioning Control of Piezoelectric Macro-micro Dual Drive[J].Transactions of the Chinese Society for Agricultural Machinery,2011,42(4):220-223,233.
摘要点击次数: 3102
全文下载次数: 1788
压电型宏微双驱动精密定位系统点位协调控制   [下载全文]
Positioning Control of Piezoelectric Macro-micro Dual Drive   [Download Pdf][in English]
  
DOI:10.3969/j.issn.1000-1298.[year].[issue].[sequence]
中文关键词:  宏微驱动  弹性铰  压电驱动器  点位协调控制
基金项目:国家自然科学基金资助项目(50875209)
作者单位
刘定强 西安理工大学 
黄玉美 西安理工大学 
谢礼 西安理工大学 
杨勇 西安理工大学 
中文摘要:设计了基于压电型微驱动器的宏微双驱动精密定位系统,宏动台由伺服电动机直接驱动,微动台由压电陶瓷驱动器和弹性铰链构成,并由压电陶瓷驱动器驱动。微动台安装在宏动台上,微动台和宏动台是串联关系。宏动台用于实现大行程微米级定位,而纳米级定位由微动台实现。利用基于运动控制卡的开放伺服功能来协调宏微工作台之间的控制,而位置反馈由两个高精度光栅完成,精度检测由激光干涉仪完成。当宏动台运动结束后,微动台根据测得的定位误差做出补偿进给。实验表明,在行程100mm的范围内每隔1mm采集一点,误差控制在±100nm以内。
Liu Dingqiang  Huang Yumei  Xie Li  Yang Yong
Xi’an University of Technology;Xi’an University of Technology;Xi’an University of Technology;Xi’an University of Technology
Key Words:Macro-micro dual drive  Flexible hinge  Piezoelectric driver  Positioning coordination control
Abstract:Based on the piezoelectric driver, a macro-micro dual drive precision positioning system was designed. The macro stage of the system was drove by servo motor. The micro stage was consisted of piezoelectric driver and flexible hinge, and drove by the former. The micro stage was mounted on the macro stage and showed a series connection. The macro stage and micro stage were used to realize large workspace and compensate the error of position, respectively. With the open serve control of motion control card, the control system of macro motion and micro motion was harmonized. The positioning feedback was realized by two high precision optical grating. The precision detection was completed by laser interferometer. In the whole closed loop control system, the micro stage compensated the position error when the macro stage finished moving. Experiment results showed that within the travel range of 100mm,the position error in every millimeter was less than ±100nm.

Transactions of the Chinese Society for Agriculture Machinery (CSAM), in charged of China Association for Science and Technology (CAST), sponsored by CSAM and Chinese Academy of Agricultural Mechanization Science(CAAMS), started publication in 1957. It is the earliest interdisciplinary journal in Chinese which combines agricultural and engineering. It always closely grasps the development direction of agriculture engineering disciplines and the published papers represent the highest academic level of agriculture engineering in China. Currently, nearly 8,000 papers have been already published. There are around 3,000 papers contributed to the journal each year, but only around 600 of them will be accepted. Transactions of CSAM focuses on a wide range of agricultural machinery, irrigation, electronics, robotics, agro-products engineering, biological energy, agricultural structures and environment and more. Subjects in Transactions of the CSAM have been embodied by many internationally well-known index systems, such as: EI Compendex, CA, CSA, etc.

   下载PDF阅读器