As a driver of piezoelectric pump, the vibration performance of piezoelectric actuator influences the performance of piezoelectric pump. There are a number of factors which influence the vibration performance of piezoelectric actuator. Therefore, in order to improve the vibration performance of piezoelectric actuator, it is essential to optimize the structural parameters and materials. Based on the finite element simulation analysis method, an orthogonal scheme of four factors and three levels was designed. Through the range analysis for the result, the influencing order of each influencing factor on two important indexes that are the oscillation amplitude and resonance frequency of piezoelectric actuator were acquired. Simultaneously, the superior schemes were obtained. Because the superior schemes were not in the original design schemes, additional designs were made and contrasted. Finally, the optimal scheme was obtained. 