In order to evaluate the effects of various errors on micromanipulator accuracy, the fabricating error, mechanism principal error, measurement error, environment error and actuator error were analyzed and a partial differentiation error model of manufacturing error was developed. The flexure hinges hole radius error, cross-sectional width error and minimum thickness error were simulated by the model, respectively. Besides, we simulated the operating process to validate the analytical error model by using the finite element method. The analytical and simulated results show that the analytical error model is correct and the minimum thickness error induces biggest stiffness error. Based on the error analysis, some methods were suggested to enhance the precision of monolithic micromanipulator. The obtained error model and data were used to establish a theoretical limit for the design and precision control of micromanipulator.