1.6 s。Utilizing a new type shape memory alloy(SMA)biometal-fiberR(BMF) as the convertor from electrical energy to mechanical energy, a pneumatic micro-servo valve was developed. Input-output characteristics of BMF100, including displacement output and load output were investigated by the experiments. The voltage hysteresis of BMF100 was 0.2V at 0.1N load and 10V maximum driving voltage, and the value was 0.4V at 1.0N load and 11V maximum driving voltage. 3-D model of servo valve was simulated by the software of CATIA. As an important part, the allowable stress and strain of coniform core of valve was studied by the numerical simulation of finite element method with software of ANSYS. Response time of pressure output of the valve was 0.3s. The result shows that it is feasible to use BMF as the convertor from electrical energy to mechanical energy of pneumatic servo micro-valve.