A three-dimensional parametric model of focusing ultrasonic levitation was built up with Pro/E, and a forth-symmetry finite element model of harmonic chamber was established based on the symmetry of harmonic chamber. The key working parameters of ultrasonic levitation were obtained by the modal analysis, and the harmonic analysis of the chamber model was carried out. The results showed that the capability of focusing levitation was better. Subsequently, the author analyzed the distributions and characteristics of the acoustic field in the chamber with various sizes. The corresponding experiments were carried out with the ultrasonic levitation system. The results indicate that the working properties parameters are in agreement with the simulated results. 