100nm。 Based on the PZT, a serial type macro-micro dual drive precision positioning mechanism system was presented in this paper. The direct-drive motor drives the macro stage of the system, and the PZT drives the micro stage. The micro stage was mounted on the macro stage. The macro stage was replenished positioning reference to the ground, and the micro stage was replenished positioning reference to the macro stage. The macro realized large workspace, and the micro realized compensates for the position error. Via the machine vision, the control system of macro motion and micro motion was harmonized and the whole system positioning was controlled. The system closed-loop feedback was realized by controlling the distance signal. The experimental results show that the travel range is 80mm, the setting time is less than 40ms, the repeatability error is 100nm.